ICP Enhanced HIPIMS System Design and Characterisation
Date
2020-11-03
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
ORCID
Type
Thesis
Degree Level
Masters
Abstract
A custom inductively coupled plasma assisted high-power impulse magnetron sputtering system was designed and assembled for the study of E x B plasma spoke instabilities. The magnetron plasma was characterized using time-resolved Langmuir probe, floating probe,
optical emission spectroscopy and high-speed camera methods. Fluctuations in the floating potential of the plasma were observed, this was attributed to localized rotating spokes. Localized spoke structures were observed in the camera footage, the shape and size of these spokes were found to be influenced by argon gas rarefaction.
Description
Keywords
Sputtering, HiPIMS, Spokes
Citation
Degree
Master of Science (M.Sc.)
Department
Physics and Engineering Physics
Program
Physics