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dc.contributor.advisorBradley, Michael
dc.contributor.advisorCouedel, Lenaic
dc.creatorChang, Alex
dc.date.accessioned2020-11-03T14:57:19Z
dc.date.available2020-11-03T14:57:19Z
dc.date.created2020-09
dc.date.issued2020-11-03
dc.date.submittedSeptember 2020
dc.identifier.urihttp://hdl.handle.net/10388/13119
dc.description.abstractA custom inductively coupled plasma assisted high-power impulse magnetron sputtering system was designed and assembled for the study of E x B plasma spoke instabilities. The magnetron plasma was characterized using time-resolved Langmuir probe, floating probe, optical emission spectroscopy and high-speed camera methods. Fluctuations in the floating potential of the plasma were observed, this was attributed to localized rotating spokes. Localized spoke structures were observed in the camera footage, the shape and size of these spokes were found to be influenced by argon gas rarefaction.
dc.format.mimetypeapplication/pdf
dc.subjectSputtering
dc.subjectHiPIMS
dc.subjectSpokes
dc.titleICP Enhanced HIPIMS System Design and Characterisation
dc.typeThesis
dc.date.updated2020-11-03T14:57:20Z
thesis.degree.departmentPhysics and Engineering Physics
thesis.degree.disciplinePhysics
thesis.degree.grantorUniversity of Saskatchewan
thesis.degree.levelMasters
thesis.degree.nameMaster of Science (M.Sc.)
dc.type.materialtext
dc.contributor.committeeMemberYansun, Yao
dc.contributor.committeeMemberChijin, Xiao
dc.contributor.committeeMemberBoland, Mark
dc.contributor.committeeMemberChung, Chi Yung


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