Now showing items 1-5 of 5
Modeling and analysis of thick suspended deep x-ray liga inductors on CMOS/BiCMOS substrate
Modeling and simulation results for two types of 150 μm height air suspended inductors proposed for LIGA fabrication are presented. The inductor substrates used model the TSMC 0.18 μm CMOS/BiCMOS substrates. The ...
High aspect ratio transmission lines and filters
There are a significant number of microwave applications, where improvement of such qualities as manufacturing costs, size, weight, power consumption, etc. have attracted much research interest. In order to meet these ...
LIGA-micromachined tight microwave couplers
There are a significant number of microwave applications, including active antenna arrays, wireless communication systems, navigational applications, etc., where improvement of such qualities as manufacturing costs, size, ...
LIGA cavity resonators and filters for microwave and millimetre-wave applications
High performance microwave cavities for various circuits in the front-end of transceivers such as filters, diplexers, and oscillators have conventionally been built with rectangular or cylindrical metallic waveguides, which ...
Electrostatically actuated LIGA-MEMS structures with high aspect ratio beams for RF applications and mechanical property extraction
Microelectromechanical systems (MEMS) devices have been increasing in popularity for radio frequency (RF) and microwave communication systems due to the ability of MEMS devices to improve the performance of these circuits ...