Browsing Graduate Theses and Dissertations by Author "Kaganovich, Igor"
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Anomalous and nonlinear effects in inductively coupled plasmas
Tyshetskiy, Yuriy Olegovich (2003-12-08)In this thesis the nonlinear effects and heating are studied in inductively coupled plasma (ICP) in a regime of anomalous skin effect (nonlocal regime). In this regime the thermal motion of plasma electrons plays an important ...