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      • HARVEST
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      Modeling and analysis of thick suspended deep x-ray liga inductors on CMOS/BiCMOS substrate

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      Date
      2006-05-31
      Author
      Yu, Xiaoyang
      Type
      Thesis
      Degree Level
      Masters
      Metadata
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      Abstract
      Modeling and simulation results for two types of 150 μm height air suspended inductors proposed for LIGA fabrication are presented. The inductor substrates used model the TSMC 0.18 μm CMOS/BiCMOS substrates. The RF performance between the suspended structure and the unsuspended counterpart are compared and the advantage of the suspended structures is explored. The potential of LIGA for fabricating high suspended inductors with good performance and for combining these with CMOS/BiCMOS is demonstrated.
      Degree
      Master of Science (M.Sc.)
      Department
      Electrical Engineering
      Program
      Electrical Engineering
      Supervisor
      Klymyshyn, David M.
      Copyright Date
      May 2006
      URI
      http://hdl.handle.net/10388/etd-07312006-101710
      Subject
      X-ray
      Inductors
      LIGA
      BICMOS
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      • Graduate Theses and Dissertations
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