Modeling and analysis of thick suspended deep x-ray liga inductors on CMOS/BiCMOS substrate

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Date
2006-05-31Author
Yu, Xiaoyang
Type
ThesisDegree Level
MastersMetadata
Show full item recordAbstract
Modeling and simulation results for two types of 150 μm height air suspended inductors proposed for LIGA fabrication are presented. The inductor substrates used model the TSMC 0.18 μm CMOS/BiCMOS substrates. The RF performance between the suspended structure and the unsuspended counterpart are compared and the advantage of the suspended structures is explored. The potential of LIGA for fabricating high suspended inductors with good performance and for combining these with CMOS/BiCMOS is demonstrated.
Degree
Master of Science (M.Sc.)Department
Electrical EngineeringProgram
Electrical EngineeringSupervisor
Klymyshyn, David M.Copyright Date
May 2006Subject
X-ray
Inductors
LIGA
BICMOS