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dc.contributor.advisorKlymyshyn, David M.en_US
dc.creatorYu, Xiaoyangen_US
dc.date.accessioned2006-07-31T10:17:10Zen_US
dc.date.accessioned2013-01-04T04:49:23Z
dc.date.available2006-08-02T08:00:00Zen_US
dc.date.available2013-01-04T04:49:23Z
dc.date.created2006-05en_US
dc.date.issued2006-05-31en_US
dc.date.submittedMay 2006en_US
dc.identifier.urihttp://hdl.handle.net/10388/etd-07312006-101710en_US
dc.description.abstractModeling and simulation results for two types of 150 μm height air suspended inductors proposed for LIGA fabrication are presented. The inductor substrates used model the TSMC 0.18 μm CMOS/BiCMOS substrates. The RF performance between the suspended structure and the unsuspended counterpart are compared and the advantage of the suspended structures is explored. The potential of LIGA for fabricating high suspended inductors with good performance and for combining these with CMOS/BiCMOS is demonstrated.en_US
dc.language.isoen_USen_US
dc.subjectX-rayen_US
dc.subjectInductorsen_US
dc.subjectLIGAen_US
dc.subjectBICMOSen_US
dc.titleModeling and analysis of thick suspended deep x-ray liga inductors on CMOS/BiCMOS substrateen_US
thesis.degree.departmentElectrical Engineeringen_US
thesis.degree.disciplineElectrical Engineeringen_US
thesis.degree.grantorUniversity of Saskatchewanen_US
thesis.degree.levelMastersen_US
thesis.degree.nameMaster of Science (M.Sc.)en_US
dc.type.materialtexten_US
dc.type.genreThesisen_US


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