University of SaskatchewanHARVEST
  • Login
  • Submit Your Work
  • About
    • About HARVEST
    • Guidelines
    • Browse
      • All of HARVEST
      • Communities & Collections
      • By Issue Date
      • Authors
      • Titles
      • Subjects
      • This Collection
      • By Issue Date
      • Authors
      • Titles
      • Subjects
    • My Account
      • Login
      JavaScript is disabled for your browser. Some features of this site may not work without it.
      View Item 
      • HARVEST
      • Electronic Theses and Dissertations
      • Graduate Theses and Dissertations
      • View Item
      • HARVEST
      • Electronic Theses and Dissertations
      • Graduate Theses and Dissertations
      • View Item

      High power solid state modulator for plasma ion implementation

      Thumbnail
      View/Open
      thesis_HQ_print.pdf (13.25Mb)
      Date
      2006-09-12
      Author
      Steenkamp, Casper JT
      Type
      Thesis
      Degree Level
      Masters
      Metadata
      Show full item record
      Abstract
      This thesis details the design and development of a solid-state, high power modulator for driving plasma ion implantation systems. A plurality of modulators can be stacked in a Marx geometry to allow complete voltage (implantation energy) scalability. Unlike a classic Marx modulator, the design employs actively controlled charging and discharging paths. This allows maximum modulation flexibility and efficiency. A hybrid Marx bank - pulse transformer configuration was commissioned in a 20keV 12A plasma ion implantation system for the purpose of photonics research. The design portion of this work is accompanied by an investigation, extension and discretization of the Lieberman analytical model of plasma ion implantation dynamics. The model predicts final implantation concentrations as well as system operational limits in specific plasma conditions. A new extension to the model accounts for subtle time-of-flight effects on accelerating ions. Agreement between modeled and measured ion currents is good.Finally, a collection of material processing experiments conducted with the plasma ion implantation system since its inauguration in February 2006 is briefly presented. In it, a new silicon-based light emitting diode is introduced.
      Degree
      Master of Science (M.Sc.)
      Department
      Physics and Engineering Physics
      Program
      Physics and Engineering Physics
      Supervisor
      Bradley, Michael P.
      Committee
      Moewes, Alexander; Manson, Alan; Hussey, Glenn C.; Hirose, Akira
      Copyright Date
      September 2006
      URI
      http://hdl.handle.net/10388/etd-09152006-112403
      Subject
      Marx generator
      plasma immersion ion implantation
      high voltage modulator
      pulse generator
      Collections
      • Graduate Theses and Dissertations
      University of Saskatchewan

      University Library

      The University of Saskatchewan's main campus is situated on Treaty 6 Territory and the Homeland of the Métis.

      © University of Saskatchewan
      Contact Us | Disclaimer | Privacy