Modeling and analysis of thick suspended deep x-ray liga inductors on CMOS/BiCMOS substrate
Date
2006-05-31
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
ORCID
Type
Degree Level
Masters
Abstract
Modeling and simulation results for two types of 150 μm height air suspended inductors proposed for LIGA fabrication are presented. The inductor substrates used model the TSMC 0.18 μm CMOS/BiCMOS substrates. The RF performance between the suspended structure and the unsuspended counterpart are compared and the advantage of the suspended structures is explored. The potential of LIGA for fabricating high suspended inductors with good performance and for combining these with CMOS/BiCMOS is demonstrated.
Description
Keywords
X-ray, Inductors, LIGA, BICMOS
Citation
Degree
Master of Science (M.Sc.)
Department
Electrical Engineering
Program
Electrical Engineering