ICP Enhanced HIPIMS System Design and Characterisation
A custom inductively coupled plasma assisted high-power impulse magnetron sputtering system was designed and assembled for the study of E x B plasma spoke instabilities. The magnetron plasma was characterized using time-resolved Langmuir probe, floating probe, optical emission spectroscopy and high-speed camera methods. Fluctuations in the floating potential of the plasma were observed, this was attributed to localized rotating spokes. Localized spoke structures were observed in the camera footage, the shape and size of these spokes were found to be influenced by argon gas rarefaction.
Sputtering, HiPIMS, Spokes
Master of Science (M.Sc.)
Physics and Engineering Physics